PDS Series Photoresist Dispensing System

PDS Series Photoresist Dispensing System



Max. Discharge Capacity to 5 ml/shot

Repeatable accuracy

PDS Photoresist Dispensing Pumps PDS Photoresist Dispensing Pumps
Download Manual Download PDS Manual Download Catalog

Magnetic Drive Pumps Magnetic Drive Pumps
High Purity Pumps
Metering Pumps
Bellows Pumps
Chemical Process Pumps
Self-Priming Pumps
  • Superior resist handling - The use of high-torque, stepper motor technology results in a consistent controllable discharge volume. The discharge volume is not affected by changes in viscosity or by filter performance.

  • Repeatable accuracy of 0.3% of the discharge volume is maintained at all times.
    • Repeated precision: ±0.3% (F.S.)
    • Linearity: ±0.5% (F.S.)
    • Resolution: 0.01 ml or below

  • High Purity - The pump end utilizes a tubephragm design eliminating dead volume and low velocity areas where resist can stagnate. This prevents the collection of particles and allows the pumps to maintain the highest purity possible.

  • Flexibility in Applications - The discharge velocity as well as volume are easily adjusted to expand the capabilities to many resist-coating processes, including the application of small amounts of resist in a short period of time.
Max discharge capacity
5 mL/shot
Max discharge pressure
0.15 MPa
Discharge speed
0.1 to 4.0 mL/sec
Suction speed
0.1 to 3.0 mL/sec
Liquid temperature range
15 to 25°C
Power supply
DC 24V
Main materials

For more information, please contact Iwaki America customer service at service@iwakiamerica.com