FS Series

FS Series - Pneumatic Drive Bellows Pump



Max. Discharge capacity: up to 14.5 GPM

FS Pneumatic Drive Bellows Pump

Compact, all-temperature rated, low-cost, air-driven bellows pump

Iwaki America’s FS is a compact, all-temperature rated, low-cost, air-driven, bellows pump series designed for the semiconductor industry, chemical delivery or recirculation. This pump handles high temperature nitride etch and piranha etch applications with ease. FS features intelligent drive technology and leak sensing, with a significant cost savings over previous models, and a 2-year warranty.


FS Curves Curves
  FS-15 Curve FS-15HT
  FS-30 Curve FS-30HT
  FS-60 Curve FS-60HT
FS Specs Specifications
FS Dimensions Dimensions
FS Manual Instruction Manual
FS Catalog Catalog

  • FS is rated for liquid temperatures ranging from 5° to 180°C with discharge pressures up to 73 psi, making it the perfect pump for wet process tools, cleaning and chemical feed applications.

  • Utilizing stroke rates up to 240 spm, FS is able to produce up to 50% higher flow rates in a significantly smaller space.FS has a contamination-free design; all liquid contact parts are made of PTFE/PFA.

  • The anti-torsion air chamber design eliminates the need for retorquing connecting rods.

  • The intelligent sensor drive system of Iwaki America’s FS design uses proximity switches and an external solenoid valve allowing the pump operation to be easily controlled and monitored.
Model FS-15HT1/T2 FS-30HT1/T2 FS-60HT1/T2
Max Discharge Capacity 4.0 GPM (15 LPM) 8.0 GPM (30 LPM) 14.5 GPM (55 LPM)
Max Stroke speed 240 SPM 220 SPM 200 SPM
Liquid temperature range 41-122°F (5-50°C) / 123-212°F (51-100°C) / 213-356°F (101-180°C)
Max air supply pressure 22.5-75 PSI (.15 - .5 MPa) / 22.5-45 PSI (.15 - .3 MPa) / 22.5-30 PSI (.15 - .2 MPa)
Max air consumption 200 NL/min / 160 NL/min / 110 NL/min
Pump connection size PFA 1/2" O.D. (12.7 mm) 3/4" O.D. (19 mm) 1" O.D. (25.4 mm)
Supply air connection size* PT 1/4" (6.35 mm) PT 3/8" (9.5 mm)