High Purity Pumps

High-purity pumps are specialized pumps designed for applications that require the handling of high-purity fluids. Iwaki America provides fluid handling solutions to the semiconductor equipment industry. Our high-purity pumps are provided for on-tool chemical generation and concentration management. They help transfer and circulate fluids without introducing contaminants or impurities. As the leader in surface preparation recirculation pumps, our pumps are the choice for CMP, etch/strip, and copper solution handling. Iwaki pumps are ideal for all of your high-purity applications. From dosing to recirculation and transfer, Iwaki has a pump for all your chemical needs that demand high purity. Browse our collection to find the right high-purity pump for your applications!

FF / FF-H Series High Purity Pumps

FF/FF-H Series

11.6 GPM / 45 LPM

FF/FF-H Series

Max. Capacity:
11.6 GPH / 45 LPM
Max. Pressure: 45 PSI
Strokes per minute: 120 SPM
Liquid Temperature Range:
41-356° F / 5-180° C

FA Series High Purity Pumps

FA Series

10.6 GPM / 20 LPM

FA Series

Max. Capacity:
10.6 GPH / 20 LPM
Max. Pressure: 57 PSI
Strokes per minute: 150 SPM
Liquid Temperature Range:
41-212° F / 5-100° C

FW/FW-H Series High Purity Pumps

FW/FW-H Series

12.9 GPM / 50 LPM

FW/FW-H Series

Max. Capacity:
12.9 GPH / 50 LPM
Max. Pressure: 43 PSI
Strokes per minute: 120 SPM
Liquid Temperature Range:
50-356° F / 10-180° C

FS Series High Purity Pumps

FS Series

14.5 GPM / 55 LPM

FS Series

Max. Capacity:
14.5 GPH / 55 LPM
Max. Pressure: 75 PSI
Strokes per minute: 240 SPM
Liquid Temperature Range:
41-356° F / 5-180° C

FLP-60W Series High Purity Pumps

FLP-60W Series

13.2 GPM / 50 LPM

FLP-60W Series

Max. Capacity:
13.2 GPH / 50 LPM
Max. Pressure: 72.5 PSI
Strokes per minute: 160 SPM
Liquid Temperature Range:
41-356° F / 5-180° C

PDS Series High Purity Pumps

PDS Series

5 mL/shot

PDS Series

Max. Capacity:
5 mL/shot
Max. Pressure: 0.15 MPa
Liquid Temperature Range
59-77° F / 15-25° C

CFD Series High Purity Pumps

CFD Series

1 mL/shot

CFD Series

Max. Capacity:
1 mL/shot
Max. Pressure: 7.25 PSI
Strokes per minute: 30 SPM
Liquid Temperature Range
68-140° F / 5-180° C

MDM Series High Purity Pumps

MDM Series

350 GPM / 1325 LPM

MDM Series

Max. Capacity:
350 GPM / 1325 LPM
Liquid Temperature Range:
32-300° F / 0-150° C

Types of High Purity Pumps Provided by Iwaki America

The following are a few popular types of high-purity pumps provided by us.

  • MDM Series: Can achieve a maximum capacity of up to 1325 LPM and withstand temperatures up to 300 degrees Fahrenheit. Suited for high purity applications.
  • FF/F-H Series: Can achieve a maximum capacity of up to 45 LPM and the maximum pressure of 45 PSI. Feature liquid ends made of fluoropolymers that assure purity and corrosion resistance.
  • FA Series: Can achieve a maximum capacity of up to 20 LPM and the maximum pressure of 57 PSI. Feature liquid ends made of fluoropolymers that assure purity and corrosion resistance.
  • FW/FW-H Series: Can achieve a maximum capacity of up to 50 LPM and the maximum pressure of 43 PSI. Feature a reliable leak detection feature that helps avoid contamination.
  • FS Series: Can achieve a maximum capacity of up to 55 LPM and the maximum pressure of 55 PSI. Feature a contamination-free design, and all liquid parts are made of PTFE/PFA.
  • FLP-60W Series: Can achieve a maximum capacity up to 50 LPM and the maximum pressure of 72.5 PSI. Unique design lowers air consumption by up to 30% compared to standard designs.
  • PDS Series: Can achieve a maximum capacity of up to 5mL/shot and the maximum pressure of 0.15 MPa. Features a tubephragm design that helps eliminate low velocity, dead volume, and prevents the collection of particles.
  • CFD Series: Can achieve a maximum capacity up to 1mL/shot and the maximum pressure of 7.25 Mpa. Features PFA and PTFE wetted parts that ensure process purity.

How to Choose High-Purity Metering Pumps for Your Application

Our collection features high-purity pumps for various applications. They are designed to serve specific purposes, so they have different specifications.

  • Address your Application Requirements: Every application is different and their pumping needs may vary. So, you must address factors like the type of fluid to be handled, pressure requirements, flow rate, temperature range, and specific industry regulations or standards to be met. This will help you narrow down the options and choose a pump suitable for your requirements.
  • Focus on Fluid Compatibility: Check if the pump materials are compatible with the fluid being handled. Consult our chemical resistant guide to select the proper material for your application.
  • Assess Sealing Technology: Iwaki centrifugal pumps offer magnetic drive sealless technology, which help eliminate the need for dynamic seals, and reduce the risk of cross-contamination and leakage.
  • Quality and Certification: Always consider pumps from manufacturers with ISO 9001 or industry-specific certifications like FDA compliance. We are ISO 9001 certified and have been successfully delivering to applications with unique liquid handling applications.
  • Seek Expert Advice: You can consult with our pump experts with decades of experience in designing pumps for high purity applications. They can guide you through your application based on their expertise and help you select the most suitable pump for your specific needs.

Do you want to learn more about high-purity metering pumps? Or need guidance on choosing the right pump? Get in touch with us today. You can call us at 508.429.1440 or mail us at info@iwakiamerica.com to learn more about our high-purity pumps.